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Levitation Micro-Systems: Applications to Sensors and Actuators
Description
(Microsystems and Nanosystems) 1st ed. 2021 Edition
by Kirill Poletkin (Author)
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
Details
Year:
2021
Pages:
178
Language:
English
Format:
PDF
Size:
8 MB
ISBN-10:
3030589072
ISBN-13:
978-3030589073
ASIN:
B08NWWD68C
