(Materials Degradation and Failure) 1st Edition
by Atul Tiwari (Editor), Baldev Raj (Editor)
The fabrication of MEMS has been
predominately achieved by etching the polysilicon material. However,
new materials are in large demands that could overcome the hurdles in
fabrication or manufacturing process. Although, an enormous amount of
work being accomplished in the area, most of the information is treated
as confidential or privileged. It is extremely hard to find the
meaningful information for the new or related developments. This book is
collection of chapters written by experts in MEMS and NEMS technology.
Chapters are contributed on the development of new MEMS and NEMS
materials as well as on the properties of these devices. Important
properties such as residual stresses and buckling behavior in the
devices are discussed as separate chapters. Various models have been
included in the chapters that studies the mode and mechanism of failure
of the MEMS and NEMS.
This book is meant for the graduate
students, research scholars and engineers who are involved in the
research and developments of advanced MEMS and NEMS for a wide variety
of applications. Critical information has been included for the readers
that will help them in gaining precise control over dimensional
stability, quality, reliability, productivity and maintenance in MEMS
and NEMS. No such book is available in the market that addresses the
developments and failures in these advanced devices.
