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Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Description
1st Edition
by Imin Kao (Author), Chunhui Chung (Author)
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
Details
Year:
2021
Pages:
295
Language:
English
Format:
PDF
Size:
12 MB
ISBN-10:
470061219
ISBN-13:
978-0470061213
ASIN:
B08SHVDK32
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